Beilstein J. Nanotechnol.2019,10, 1511–1522, doi:10.3762/bjnano.10.149
, resulting in significant improvements of the quality of the ITO films that are commonly used as conductivetransparentelectrodes for photovoltaic structures. Starting from a single sintered target (purity 99.95%), ITO thin films of predefined thickness (230 nm, 300 nm and 370 nm) were deposited at room
treatment in an open atmosphere. Such films could be used to manufacture transparent contact electrodes for solar cells.
Keywords: conductivetransparentelectrodes; indium tin oxide (ITO) films; optical properties; radio-frequency magnetron sputtering (rfMS); rapid thermal annealing (RTA); Introduction
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Figure 1:
Cross-sectional SEM images of the cleaved as-deposited (a,c,e) and RTA-processed (b,d,f) ITO films,...